منابع مشابه
Excimer Lasers in Medicine
Introduction Excimer lasers emit light energy, short optical pulses at ultraviolet wavelengths, that results in a unique laser tissue interaction. This has led to an increasing number of studies into medical applications of these lasers in fields such as ophthalmology, urology, cardiology and neurology. The typical excimer laser is operated with a combination of a halogen (fluorine or chlorine)...
متن کاملDeep-UV Excimer Lasers
The recent trend in microelectronics towards patterning critical feature sizes of 0.25 m and below has motivated the development of microlithography at the deep ultra-violet (DUV) laser wavelengths of 248 and 1 93 nm. In recent years the performance, reliability, and cost of ownership of excimer light sources have improved. Some key technologies needed for excimer lasers in microlithography inc...
متن کاملExcimer lasers—40 never looked better
The first commercial excimer laser was introduced 40 years ago by Lambda Physik (now Coherent; Santa Clara, CA). Interestingly, its developers— Bernd Steyer and Dirk Basting—were both chemists whose main goal was to develop a light source for photochemistry and dye laser pumping. As soon as excimer lasers entered the market, Lambda Physik began to investigate other possible uses for a powerful ...
متن کاملDischarge technology for excimer lasers of high average power
The self-sustained discharge of excimers is analyzed. Several excitation schemes that have been successfully applied are compared. For high repetition rate operation not only the discharge stability and its efficiency are important selection criteria but more important is the potential of fast discharge switching with minimum pulse energy. Pulse compression plays a key role in the laser perform...
متن کاملFabrication of High-Aspect-Ratio Microstructures Using Excimer Lasers
An excimer laser micromachining system is developed to study the process in fabricating high-aspect-ratio microstructures. Specifically, the study experimentally examines process efficiency and the impact of changing major laser operating parameters on the resulting microstructural shapes and morphology. The materials considered in the study include glass, silicon, and aluminum. The ablation or...
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ژورنال
عنوان ژورنال: The Review of Laser Engineering
سال: 1995
ISSN: 0387-0200,1349-6603
DOI: 10.2184/lsj.23.1038